Wafer Storage

Safety Application Example

Robotic Wafer Store Guarding

Application:
Point-of-operation guarding of the access to a robotic semiconductor wafer pod stacking and storage system

Description:
A stacker robot moves inside the storage system. Interruption of the light screen results in arrest of the robot arm motion.

Guarding:
The opening is guarded with one light screen

Light Screen:
MICRO-SCREEN system

WARNING:
This application example depicts only generalized guarding and should not be automatically treated as a solution for any particular situation. Every guarding application has a unique set of safety requirements which must be carefully examined. Extreme care is urged to ensure that all safety and legal requirements are met and that all installation instructions are followed.
In addition, any questions regarding safeguarding should be directed to the factory’s own Safety Department or Safety Officer. No responsibility will be taken for use of these examples which are only guidelines to the types of equipment available.